Ion beam etching

Manufacturer: scia Systems GmbH
Model: Scia Mill 150
Facility: Chair of Coating Technologies in Electronics

Multi target sputter tool

Manufacturer: von Ardenne Anlagentechnik GmbH
Model: LS730s
Facility: Chair of Coating Technologies in Electronics

Sputter system with RF and (pulsed) DC modes for depostions by use of up to 4 simultaneously active metallic and/or ceramic targets. Operating temperature < 650 °C (<1200 °F)

Differential Laser Doppler Vibrometer

Manufacturer: Polytec
Facility: Chair of Biomedical Sensor Technology

Pyrometer

Manufacturer: Heimann, infra sensor, Raytek
Facility: Chair of Solid-State Electronics (Senior Professor)

Schwarze Strahler

Manufacturer: MIKRON, DIAS, HGH
Model: M300, RCN 300
Facility: Chair of Solid-State Electronics (Senior Professor)

Laserinterferometer

Manufacturer: SIOS
Model: SP 120
Facility: Chair of Solid-State Electronics (Senior Professor)

chip bonder

Manufacturer: K&S
Model: Types 1419 & 4126
Facility: Chair of Coating Technologies in Electronics

Photo lithografy

Facility: Chair of Coating Technologies in Electronics

FTIR-Spektrometer

Manufacturer: Perkin-Elmer
Model: Spectrum 2000
Facility: Chair of Solid-State Electronics (Senior Professor)

Profilometer

Manufacturer: Veeco Instruments GmbH
Model: DEKTAK 3 ST AUTO
Facility: Chair of Coating Technologies in Electronics