View all instruments of this unit Photo lithografy
Basic Information
| Name: | Photo lithografy | |
| Facility: | Chair of Coating Technologies in Electronics | |
| Partner: | Technische Universität Dresden (TUD) |
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| Location: | WHB | |
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Access Requirements
Preliminary consultation required, no independent use
Last Update
Last updated at: 10 March 2026 at 12:00:39