View all instruments of this unit Ion beam etching scia Systems GmbH Scia Mill 150
Basic Information
| Name: | Ion beam etching | |
| Manufacturer: | scia Systems GmbH | |
| Model: | Scia Mill 150 | |
| Facility: | Chair of Coating Technologies in Electronics | |
| Partner: | Technische Universität Dresden (TUD) |
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| Location: | WHB | |
| Inventory number: | 25154305 | |
Description
The scia Mill 150 is designed for structuring of complex multilayers of various materials. With its fully reactive gas compatibility the system also enables reactive etching processes with enhanced selectivity and rate. Due to its space saving design the scia Mill 150 is ideal for small scale production and R&D applications. ((C) Scia Systems GmbH)
Link to Further Details
https://www.scia-systems.com/products/ion-beam-etching/scia-mill-150
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Access Requirements
Preliminary consultation required, no independent use
Last Update
Last updated at: 10 March 2026 at 12:26:09