View all instruments of this unit Parametric Test System Keithley S530 basic EG4090µ; B1500 EG4090µ UF3000EX
Basic Information
| Name: | Parametric Test System | |
| Manufacturer: | Keithley | |
| Model: | S530 basic EG4090µ; B1500 EG4090µ UF3000EX | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
| Inventory number: | ELO-PARTEST; PAR-TEST01, PAR-TEST02 | |
Description
- Matrix up to 72 channels, wafer size 6", 8"; temperature: -40 ... +125 °C
- 48 channels, wafer size4", 5", 6", 8", 12"; temperature: -40 ... +125 °C
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Test of wafer |
Last Update
Last updated at: 14 January 2025 at 15:42:37