View all instruments of this unit ALD Anlagen FHR / Beneq
Basic Information
| Name: | ALD Anlagen | |
| Manufacturer: | FHR / Beneq | |
| Facility: | Chair for Semiconductor Technology (HLT) | |
| Partner: | Technische Universität Dresden (TUD) |
|
Description
2-Kammersystem mit UHV-Analytikkammer-XPS/AFM/STM
Points of Contact
Prof. Dr. rer. nat. J.W. Bartha/ Mrs. R. Pfennig (Secretary)
Web:
Email:
Phone:
+49 351 463-35468
Fax:
+49 351 463-37172
Last Update
Last updated at: 13 July 2017 at 11:54:08