LV Scanning Electron Microscope (SEM)

Manufacturer: JEOL GmbH
Model: JSM-6610LV
Facility: Senior Professorship Microsystems Technology

Rasterelektronenmikroskop mit „Low-Vacuum“-Betrieb.

Usability for Process Industries (UPI) Lab

Manufacturer: Mangold
Facility: Chair of Process Control Systems Engineering

The UPI laboratory provides the possibility to study the daily usability of stationary and mobile devices within a controlled environment.

Test Bench for Electrical Machines and Drives

Manufacturer: Fa. Berghof Mühlhausen/Thüringen
Model: Sonderanfertigung
Facility: Chair of Electrical Machines and Drives

Photo Plotter

Manufacturer: MIVA Technologies GmbH
Model: MIVA 26100
Facility: Institute of Electronic Packaging Technology

Feinstlineplotter u.a. zur Tageslichtbelichtung von s/w-Planfilmen und Glasplatten.

Mask Aligner

Manufacturer: EV Group
Model: EVG 640
Facility: Institute of Electronic Packaging Technology

Mask Aligner für Photolithographie-Anwendungen in den Bereichen Advanced-Packaging, 3D-Packaging, MEMS, Interposer-Technologien, Fotovoltaik, Nanotechnologie und Wafer- und Board-Level-Optik

Furnace

Manufacturer: ATV Technologie GmbH
Model: ATV PEO-630
Facility: Institute of Electronic Packaging Technology

Brennofen zum Brennen und Sintern von Keramiken.

Echoic chamber

Facility: Chair of Acoustics and Haptics

Multi-Modalen Measurement Laboratory

Facility: Chair of Acoustics and Haptics

Large anechoic chamber

Facility: Chair of Acoustics and Haptics

Stylus Profilometry

Manufacturer: Veeco
Model: Dektak 8
Facility: Chair for Semiconductor Technology

Profilometer bis 100mm Weglänge. Messungen intrinsischer Schichtspannungen.